Změnit instituci
Pokročilé nano a mikrotechnologie Pokročilé materiály Strukturní biologie Gen. a prot. rostlin. systémů Molekulární medicína Výzkum mozku a lidské mysli Molekulární vet. medicína

Příprava a charakterizace nanostruktur - Tomáš Šikola

Vedoucí výzkumné skupiny
Researcher ID
Telefon: +420 54114 2707
Zástupce vedoucího výzkumné skupiny
Telefon: +420 54114 2848
E-mail: ,

Research areas

  • Fabrication of nanostructures using bottom-up methods
  • Fabrication of nanostructures using top-down methods (nanolithography)
  • Investigation of the functional properties of nanostructures
  • The development of analytical and measurement methods

Main objectives

Fabrication of nanostructures using bottom-up and top-down methods (nanolithography)

Development of methods for the fabrication of nanostructures: planar physical and plasmochemical methods using EBL, UV lithography, FIB, SPM lithography, and imprint technology. MBE, CVD, ALD, PECVD, hybrid methods for selective growths, etc. All the methods developed are utilized directly for fabrication of nanostructures, advanced planar materials and devices.

Investigation of the functional properties of nanostructures

Specification and optimization of the functional properties of nanostructures for nanoelectronics, nanophotonics and (bio)sensing their correlation with geometrical/structural parameters of nanostructures and operational parameters. Novel and unique properties of nanostructures not observable in conventional materials and microstructures open the ways for qualitatively new applications.

Research and development of analytical and measurement methods

Development of techniques and methodologies for microscopy, analysis and metrology of nanomaterials/nanostructures, and for diagnostics of their properties – new techniques of nanometrology by SPM, optical methods, combination of more techniques (SEM, AFM, etc.). This will be used to meet the other objectives of the Advanced Nanotechnologies and Microtechnologies Research Programme and for the characterization of nano- and microstructures generally.

Content of research

Fabrication of nanostructures using bottom-up methods

Fabrication of nanostructures using planar technologies

Research and utilization of phenomena essential for the growth of (ultra)thin films and self-assembling of nanoobjects (nanofibres, nanotubes, nanodots etc.) with specific properties using PVD (MBE, IBAD, magnetron sputtering), CVD, PECVD and (electro)chemical methods. Attention will be paid both to the study of the initial stages of the growth of thin films and nanostructures that are of vital importance for the parameters and properties of the final products (substrate influence, nucleation, diffusion, growth modes, catalytic activity), and to finding relationships between the parameters and the properties of these products. Selective and guided growth of nanostructures on the substrates patterned by lithographic methods.

Research on the fabrication of nanofibres (especially metallic) from electrolytic solutions using e.g. polymeric and alumina matrices and the development of methods of assembling nanofibres using electrophoresis, etc.

Fabrication of nanostructures using top-down methods (nanolithography)

The development of nanolithographic methods by means of electron beam lithography, scanning probe microscopy (e.g. local anodic oxidation), focussed ion beam and their combinations with planar technologies (e.g. selective and guided growth, respectively) for the fabrication of nanostructures with minimum dimensions as close to 10 nm as possible.

  • Fabrication of nanoelements and nanodevices (quantum point contacts, rings and dots, SETs, spintronics systems, etc.)
  • Fabrication of ordered metallic nanoparticles, elements and systems (plasmonics, resonance plasmonic antennas, etc.)
  • Fabrication of ordered dielectric and semiconductor nanodots and nanowires (photonics, optoelectronics, bioactive surfaces)
  • Fabrication of metallic nanoelectrodes for making contacts to molecular nanostructures and nanoelements
  • Fabrication of novel masks (e.g. from SAM), the application of self-assembling and electrochemical methods

 sikola 1






Selective deposition of Au coloids
Negative (top) and positive (bottom) deposition of 20 nm gold nanoparticles after patterning Si substrate with Ga ion beam and immersion in the 3mM HF-modified Au colloidal solution.

Investigation of the functional properties of nanostructures

The main goal is to find correlations between the properties and the geometrical and structural parameters of nanostructures and to use this knowledge for feedback in the technology of their preparation and for various applications.

Magnetic nanostructures

The fabrication of magnetic 2D-0D ordered nanostructures and ultrathin-layered structures utilizing the combination of 3D metals and nonmagnetic materials. An experimental and theoretical study of magnetic anisotropy, transport properties (e.g. GMR, TMR) and the dynamics of domain walls and vortexes for applications in magnetic recording, sensing and spintronics.
sikola 2

Spin valve nanowires

Nanostructures for plasmonics

The fabrication and study of the properties of metallic nanostructures and microstructures suitable for plasmonics. Research on the generation, detection and application of surface plasmon polaritons. Simulation and experimental verification of localized surface resonances (localized surface plasmons) on metallic nanoparticles, nanowires and nano/micro antennas. The influence of dielectric materials (spacers) between metallic components of plasmonic structures. Applications in micro and nanosensors (including biosensors).

sikola 3
Top and side views of Ge NWs grown on Ge(100) and Ge(111) substrates.
The scale bars represent 1 mm, in insets 200 nm.

Ultrathin films and nanostructures of wide-band gap semiconductors

The fabrication of semiconductor nitride ultrathin films and nanostructures (GaN, AlN) at low and medium temperatures. A study of their electronic structures. The electric transport properties and optoelectronic properties of 0D nanostructures.

Research group SITE


seznam / vizitky

Jméno a pozice



Ing. Filip Ligmajer
Ph.D. student
+420 54114 3349
Ing. Pavel Procházka
Ph.D. student
+420 54114 2817
Ing. Jakub Sadílek
Ph.D. student
+420 54114 2788, +420 777 176 639
Ing. Kirill Andrejevič Ermakov
Ph.D. student
, +420 774 191 329
Ing. Martin Hrtoň
Ph.D. student
, +420 739 159 589
Ing. Martin Konečný
Ph.D. student
prof. RNDr. Tomáš Šikola, CSc.
Vedoucí výzkumného programu
+420 54114 2707
prof. RNDr. Jiří Spousta, Ph.D.
Senior researcher
+420 54114 2848
Ing. Michal Kvapil, Ph.D.
Junior researcher
+420 54114 3349
doc. Ing. Miroslav Kolíbal, Ph.D.
Junior researcher
+420 54114 9243
Mgr. Vlastimil Křápek, Ph.D.
Junior researcher
+420 54114 2810
Ing. Zuzana Lišková, Ph.D.
Operátor výzkumné infrastruktury
+420 54114 9217
Ing. Jindřich Mach, Ph.D.
Junior researcher
+420 54114 2813
Věra Melkesová
Administrativní pracovnice
+420 54114 2823
Ing. Michal Potoček, Ph.D.
Junior researcher
+420 54114 2814, +420 726 812 814
Ing. Josef Polčák, Ph.D.
Operátor výzkumné infrastruktury
+420 54114 9213
doc. Ing. Stanislav Průša, Ph.D.
Senior researcher
+420 54114 2832, +420 732 113 816
Ing. Mgr. Tomáš Šamořil, Ph.D.
Operátor výzkumné infrastruktury
+420 54114 9214, +420 724 228 591
Ing. Dalibor Šulc, Ph.D.
Operátor výzkumné infrastruktury
+420 54114 9257
Ing. Michal Urbánek, Ph.D.
Vedoucí CEITEC Nano
+420 54114 9200
Ing. Vojtěch Uhlíř, Ph.D.
Junior researcher
+420 54114 9220
Ing. Stanislav Voborný, Ph.D.
Junior researcher
+420 54114 2783
prof. Dr. Peter Varga, dr.h.c.
Senior researcher
Ing. Jakub Zlámal, Ph.D.
Junior researcher
+420 54114 2788
Ing. Oto Lipovský
Technický pracovník
+420 54114 2834
Ing. Tomáš Pejchal
Ph.D. student
Bruno Sedláček
Technický pracovník
+420 54114 2784
Mgr. Jitka Strouhalová
Podpůrný pracovník - technik
Ing. Petr Bábor, Ph.D.
Junior researcher
+420 54114 2783
Ing. Miroslav Bartošík, Ph.D.
Junior researcher
+420 54114 2814
Ing. Eva Kolíbalová, Ph.D.
Operátor sdílené laboratoře
+420 54114 9215
Ing. Lukáš Flajšman
Ph.D. student
doc. Ing. Jan Čechal, Ph.D.
Junior researcher
+420 54114 2810
Ing. Michal Horák
Ph.D. student
Ing. Michal Horký
Ph.D. student
Meena Dhankhar, MSc.
Ph.D. student
+420 51414 2849
RNDr. Libuše Dittrichová, Dr.
Senior researcher
+420 54114 2829
prof. RNDr. Petr Dub, CSc.
Senior researcher
+420 54114 2708
Vítězslav Duma
Technický pracovník
+420 54114 2784
Ing. Marek Vaňatka
Ph.D. student
Ing. Radek Kalousek, Ph.D.
Senior researcher
+420 54114 2783
Ing. Jan Neuman, Ph.D.
Junior researcher
+420 54114 2779, +420 54114 2779
Dana Chatrná
Administrativní pracovnice
+420 54114 2821
Ing. Michal Pavera, Ph.D.
Junior researcher
+420 54114 2811
Ing. Petr Skalka, Ph.D.
Junior researcher
+420 54114 2869
Ing. Jiří Babocký
Ph.D. student
M.Sc. Jon Ander Arregi Uribeetxebarria
Junior researcher
Ing. Zoltán Édes
Ph.D. student
Mgr. Jiří Liška, Ph.D.
Junior researcher
Ing. Lukáš Kormoš
Ph.D. student
Ing. Jakub Piastek
Ph.D. student
Ing. Vojtěch Švarc
operátor výzkumné infrastruktury
+420 54114 9257
prof. RNDr. Michal Kotoul, DrSc.
Senior researcher
+420 54114 2889, +420 54114 5206
Ing. Jaroslav Maniš
Ph.D. student
Ing. Lukáš Kejík
Ph.D. student
Ing. Lukáš Kachtík
Ph.D. student
Ing. Anton Olegovich Makoveev
technický pracovník - laborant
Ing. Ondřej Metelka
Ing. Miloš Hrabovský
Ing. Božena Čechalová
projektová manažerka
+420 54114 9261
Ing. Jakub Hrubý
Ph.D. student
Ing. Antonín Sojka
Ph.D. student
Artur Solodovnyk
Ph.D. student
Ing. Michal Staňo
junior researcher
Ing. Viktor Badin
Technický pracovník - laborant
Ing. Zdeněk Nováček, Ph.D.
Junior researcher
+420 54114 2811, +420 54114 2782
Jakub Piastek



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  • KLEY, CS; CECHAL, J; KUMAGAI, T; SCHRAMM, F; RUBEN, M; STEPANOW, S; KERN, K, 2012:Highly Adaptable Two-Dimensional Metal-Organic Coordination Networks on Metal Surfaces. JOURNAL OF THE AMERICAN CHEMICAL SOCIETY 134 (14), p. 6072 - 6075.
  • KOLIBAL, M; KALOUSEK, R; VYSTAVEL, T; NOVAK, L; SIKOLA, T, 2012:Controlled faceting in < 110 > germanium nanowire growth by switching between vapor-liquid-solid and vapor-solid-solid growth. APPLIED PHYSICS LETTERS 100 (20)
  • KOLIBAL, M; KONECNY, M; LIGMAJER, F; SKODA, D; VYSTAVEL, T; ZLAMAL, J; VARGA, P; SIKOLA, T, 2012:Guided Assembly of Gold Colloidal Nanoparticles on Silicon Substrates Prepatterned by Charged Particle Beams. ACS NANO 6 (11), p. 10098 - 10106.
  • KRAPEK, V; NOVAK, P; KUNES, J; NOVOSELOV, D; KOROTIN, DM; ANISIMOV, VI, 2012:Spin state transition and covalent bonding in LaCoO3. PHYSICAL REVIEW B 86 (19)
  • KUNES, J; KRAPEK, V; PARRAGH, N; SANGIOVANNI, G; TOSCHI, A; KOZHEVNIKOV, AV, 2012:Spin State of Negative Charge-Transfer Material SrCoO3. PHYSICAL REVIEW LETTERS 109 (11)
  • ROUGEMAILLE, N; UHLIR, V; FRUCHART, O; PIZZINI, S; VOGEL, J; TOUSSAINT, JC, 2012:Phase diagram of magnetic domain walls in spin valve nano-stripes. APPLIED PHYSICS LETTERS 100 (17), p. 17240 - .
  • UHLIR, V; VOGEL, J; ROUGEMAILLE, N; FRUCHART, O; ISHAQUE, Z; CROS, V; CAMARERO, J; CEZAR, JC; SIROTTI, F; PIZZINI, S, 2012:Current-induced domain wall motion and magnetization dynamics in CoFeB/Cu/Co nanostripes. JOURNAL OF PHYSICS-CONDENSED MATTER 24 (2)
  • ZENKYU, R; YUHARA, J; MATSUI, T; ZAMAN, SS; SCHMID, M; VARGA, P, 2012:Composition and local atomic arrangement of decagonal Al-Co-Cu quasicrystal surfaces. PHYSICAL REVIEW B 86 (11)


  • KOLIBAL, M; VYSTAVEL, T; NOVAK, L; MACH, J; SIKOLA, T, 2011:In-situ observation of < 110 > oriented Ge nanowire growth and associated collector droplet behavior. APPLIED PHYSICS LETTERS 99 (14)
  • KUNES, J; KRAPEK, V, 2011:Disproportionation and Metallization at Low-Spin to High-Spin Transition in Multiorbital Mott Systems. PHYSICAL REVIEW LETTERS 106 (25)
  • UHLIR, V; PIZZINI, S; ROUGEMAILLE, N; CROS, V; JIMENEZ, E; RANNO, L; FRUCHART, O; URBANEK, M; GAUDIN, G; CAMARERO, J; TIEG, C; SIROTTI, F; WAGNER, E; VOGEL, J, 2011:Direct observation of Oersted-field-induced magnetization dynamics in magnetic nanostripes. PHYSICAL REVIEW B 83 (2)


  • KLENOVSKY, P; KRAPEK, V; MUNZAR, D; HUMLICEK, J, 2010:Electronic structure of InAs quantum dots with GaAsSb strain reducing layer: Localization of holes and its effect on the optical properties. APPLIED PHYSICS LETTERS 97 (20)
  • KOH, AL; TOMANEC, O; URBANEK, M; SIKOLA, T; MAIER, SA; MCCOMB, DW, 2010:HRTEM and EELS of nanoantenna structures fabricated using focused ion beam techniques. ELECTRON MICROSCOPY AND ANALYSIS GROUP CONFERENCE 2009 (EMAG 2009) 241
  • URBANEK, M; UHLIR, V; BABOR, P; KOLIBALOVA, E; HRNCIR, T; SPOUSTA, J; SIKOLA, T, 2010:Focused ion beam fabrication of spintronic nanostructures: an optimization of the milling process. NANOTECHNOLOGY 21 (14)


  • Samouspořádané funkční vrstvy molekulárních kvantových bitů (7AMDE005), DAAD, 2015 - 2016
  • Výroba magnetických metamateriálů pomocí přímého zápisu fokusovaným iontovým svazkem (GA15-62503S), Czech Science Foundation - International Projects, 2015 - 2017
  • Mapování lokalizovaných plazmonových rezonancí na nanoanténách (GAP102/12/1881), Czech Science Foundation - Standard Grants, 2012 - 2014
  • Výroba kovových nanostruktur pro aplikace ve spintronice (GPP102/12/P443), Czech Science Foundation - Postdoc Grants, 2012 - 2014
  • Růst polovodičových nanovláken s optimalizovanými funkčními vlastnostmi (GPP108/12/P699), Czech Science Foundation - Postdoc Grants, 2012 - 2014
  • Platforma pokročilých mikroskopických a spektroskopických technik pro nano a mikrotechnologie (TE01020233), Technology Agency of the Czech Rep. - Centres of Competence, 2012 - 2019


The experimental facilities of the group are mainly located in clean rooms (class < 100 000). They include the following equipment:

Dual ion beam HV apparatus for ion-beam assisted deposition and ion-beam etching; complex UHV apparatus for deposition and in situ analysis of ultrathin films with four effusion cells for molecular beam deposition, a hyperthermal ion-beam source for direct ion beam deposition, and surface analytical techniques (SIMS, TOF-LEIS, XPS, TDS, LEED, RHEED, spectroscopic ellipsometry); two commercial scanning probe microscopes (AutoProbe Veeco, NT-MDT Ntegra) providing various modes such as AFM, LFM, conductive AFM, EFM, Kelvin probe, nanolithography mode and in case of NT-MDT microscope also a near field mode (SNOM) providing illumination and collection operational regimes both in reflection or transmission (inverted microscope) measuring schemes; FIB system (Tescan Mira), microreflection spectrometer; a setup for magnetooptical Kerr effect, etc. Other instruments such as standard and confocal optical microscopes and a scanning electron microscope with a lithographic option (Tescan – Vega) are available in the labs outside of the clean rooms.

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