Fabrication of graphene and study of its physical properties
Ph.D. Thesis
Procházka, P., 2018: Fabrication of graphene and study of its physical properties. PH.D. THESIS , p. 1 - 139
(ALD, DIENER, EVAPORATOR, MIRA-EBL, PECVD, TERS, WIRE-BONDER)
Equipment:
- Atomic layer deposition system Ultratech/CambridgeNanoTech Fiji 200
- Resist stripper Diener electronic NANO Plasma cleaner
- Electron beam evaporator BESTEC
- Scanning Electron Microscope/E-beam writer TESCAN MIRA3Raith LIS
- Plasma Enhanced CVD of Si-based materials Oxford Instruments Plasma Technology PlasmaPro 100
- Scanning Probe Microscope + microRaman + PhotoLuminiscence system NT-MDT Ntegra Spectra + Solar II
- Wire bonder TPT HB 16
Research Groups:
CEITEC authors: