Mechanical Properties of Individual Layers in a-SiC:H Multilayer Film

PLASMA PROCESSES AND POLYMERS

Cech, V; Trivedi, R; Skoda, D, 2011: Mechanical Properties of Individual Layers in a-SiC:H Multilayer Film. PLASMA PROCESSES AND POLYMERS 8(12), p. 1107 - 1115, doi: 10.1002/ppap.201100106

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