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Thermal stability of undoped polycrystalline silicon layers on antimony and boron-doped substrates

THIN SOLID FILMS

Lysacek, D; Valek, L; Spousta, J; Sikola, T; Spetik, R, 2010: Thermal stability of undoped polycrystalline silicon layers on antimony and boron-doped substrates. THIN SOLID FILMS 518(14), p. 4052 - 4057, doi: 10.1016/j.tsf.2010.02.018

Research Groups:

• Fabrication and Characterisation of Nanostructures

CEITEC authors:

• Prof. Jiří Spousta, Ph.D.
• Prof. Tomáš Šikola