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Selectively arranged single-wire based nanosensor array systems for gas monitoring
NANOSCALE
CHMELA, O.; SADÍLEK, J.; SAMA, DOMENECH-GIL, G.; J.; SOMER, J.; MOHAN, R.; ROMANO-RODRIGUEZ, A.; HUBÁLEK, J.; VALLEJOS VARGAS, S., 2018: Selectively arranged single-wire based nanosensor array systems for gas monitoring. NANOSCALE 10(19), p. 9087 - 10, doi: 10.1039/c8nr01588k; FULL TEXT
(RAITH, DWL, KAUFMAN, MAGNETRON, SCIA, RIE-FLUORINE, WIRE-BONDER, RIGAKU3)
Equipment:
- E-beam writer RAITH150 Two
- UV Direct Write Laser system Heidelberg Instruments DWL 66-fs
- Ion-Beam Sputter Deposition System BESTEC
- Magnetron sputtering system BESTEC
- Ion beam etching Scia Systems Coat 200
- RIE by F Chemistry and PECVD of hard C-based films Oxford Instruments Plasma Technology PlasmaPro 80
- Wire bonder TPT HB 16
- X-ray powder diffractometer Rigaku SmartLab 3kW
Research Groups:
CEITEC authors: