Shielding effect of oxide isolating layer on surface potential measured by Kelvin probe force microscopy
Master´s Thesis
Švarc, V., 2015: Shielding effect of oxide isolating layer on surface potential measured by Kelvin probe force microscopy. MASTER´S THESIS , p. 1 - 50
(ALD, DIENER, WIRE-BONDER, LYRA)
Equipment:
- Atomic layer deposition system Ultratech/CambridgeNanoTech Fiji 200
- Resist stripper Diener electronic NANO Plasma cleaner
- Wire bonder TPT HB 16
- Focused Ion Beam/Scanning Electron Microscope TESCAN LYRA3
Research Groups: