Electron beam evaporator BESTEC (EVAPORATOR)

CONTACT US

Guarantor: Jan Prášek, Ph.D.
Technology / Methodology: Etching & Deposition
Instrument status: Operational Operational, 7.5.2024 15:10
Equipment placement: CEITEC Nano - C1.36
Research group: CF: CEITEC Nano


Description:

The UHV physical vapor deposition system for thin-film e-beam deposition (mostly metals). A carousel for eight different materials, substrate rotation, and tilting is available.


Publications:

  • GALLINA, P.; KVAPIL, M.; LIŠKA, J.; KONEČNÁ, A.; KŘÁPEK, V.; KALOUSEK, R.; ZLÁMAL, J.; ŠIKOLA, T., 2023: Strong coupling in an Au plasmonic antenna-SiO2 layer system: A hybrid-mode analysis. PHYSICAL REVIEW B 107(12), p. 125144 - 6, doi: 10.1103/PhysRevB.107.125144; FULL TEXT
    (ALD, EVAPORATOR, MIRA-EBL, FTIR, NANOCALC, DEKTAK, WOOLLAM-MIR, ICON-SPM)
  • RONOH, K.; HEKMAT, S.; HOLCMAN, V.; KNÁPEK, A.; SOBOLA, D., 2023: Comprehensive characterization of different metallic thin films on highly oriented pyrolytic graphite substrate. VACUUM 215, p. 1 - 16, doi: 10.1016/j.vacuum.2023.112345; FULL TEXT
    (EVAPORATOR, KRATOS-XPS, VERIOS, ICON-SPM, WITEC-RAMAN)
  • GALLINA, P.; KONEČNÁ, A.; LIŠKA, J.; IDROBO, J.; ŠIKOLA, T., 2023: Strongly Coupled Plasmon and Phonon Polaritons as Seen by Photon and Electron Probes. PHYSICAL REVIEW APPLIED 19(2), p. 24042 - 11, doi: 10.1103/PhysRevApplied.19.024042; FULL TEXT
    (MIRA-EBL, EVAPORATOR, FTIR)
  • HEMZAL, D.; PRÁŠEK, J.; HRDÝ, R.; DRBOHLAVOVÁ, J.; KOPP, R., 2023: Surface-enhanced Raman spectroscopy investigation of PO3- (4) to Ag/Al2O3 nanopatterned substrates binding and its dynamics for sensitive detection of phosphate in water. JOURNAL OF RAMAN SPECTROSCOPY , p. 1074 - 10, doi: 10.1002/jrs.6587; FULL TEXT
    (EVAPORATOR, ALD)
  • WOJEWODA, O.; LIGMAJER, F.; HRTOŇ, M.; KLÍMA, J.; DHANKHAR, M.; DAVÍDKOVÁ, K.; STAŇO, M.; HOLOBRÁDEK, J.; KRČMA, J.; ZLÁMAL, J.; ŠIKOLA, T.; URBÁNEK, M., 2023: Observing high-k magnons with Mie-resonance-enhanced Brillouin light scattering. COMMUNICATIONS PHYSICS 6(1), p. 1 - 10, doi: 10.1038/s42005-023-01214-z; FULL TEXT
    (RAITH, MIRA-EBL, EVAPORATOR, MAGNETRON, ALD, LYRA, ICON-SPM, BRILLOUIN)

Show more publications...