Focused Ion Beam/Scanning Electron Microscope FEI Helios NanoLab 660 (HELIOS)

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Guarantor: Ondřej Man, Ph.D.
Instrument status: Operational Operational, 19.3.2024 08:39
Equipment placement: CEITEC Nano - A1.10
Research group: CF: CEITEC Nano


Description:

FEG-type scanning electron microscope with High/Low vacuum regime with resolution at least 1,5 nm @ 15 kV (in high vacuum mode) and with chamber allowing XY stage travel at least 100x100 mm. Equipped with analytical attachments EDS + WDS + EBSD.


Publications:

  • PONGRÁCZ, J.; VACEK, P.; GRÖGER, R., 2023: Recombination activity of threading dislocations in MOVPE-grown AlN/Si {111} films etched by phosphoric acid. JOURNAL OF APPLIED PHYSICS 134(19), doi: 10.1063/5.0171937; FULL TEXT
    (LYRA, ICON-SPM, HELIOS, TITAN, LEICACOAT-NANO)
  • POLAT, Ö.; HORÁK, M.; ARREGI URIBEETXEBARRIA, J.; BUKVIŠOVÁ, K.; ZLÁMAL, J.; ŠIKOLA, T., 2023: Synthesis and characterization of half-Heusler ScPtBi films via three-source magnetron co-sputtering on Nb superconductor buffer layer. SURFACES AND INTERFACES 40, doi: 10.1016/j.surfin.2023.103118; FULL TEXT
    (MAGNETRON, RIGAKU9, TITAN, HELIOS, KRATOS-XPS, CRYOGENIC, LYRA)
  • ALFREIDER, M.; MEINDLHUMER, M.; ZIEGELWANGER, T.; DANIEL, R.; KECKES, J.; KIENER, D., 2023: Revealing dynamic-mechanical properties of precipitates in a nanostructured thin film using micromechanical spectroscopy. MRS BULLETIN 49(1), p. 49 - 10, doi: 10.1557/s43577-023-00549-w; FULL TEXT
    (HELIOS, TITAN)
  • Mouralova, K.; Bednar, J.; Benes, L.; Polzer, A.; Zahradnicek, R.; Fries, J.; Prokes, T., 2023: Machining of 1.2363 and 1.2343ESR steels using EDM. JOURNAL OF THE BRAZILIAN SOCIETY OF MECHANICAL SCIENCES AND ENGINEERING 45(7), doi: 10.1007/s40430-023-04293-9; FULL TEXT
    (DEKTAK, LYRA, TITAN, HELIOS, TEGRAMIN)
  • Bondarev, A.; Al-Rjoub, A.; Bin Yaqub, T.; Polcar, T.; Fernandes, F., 2023: TEM study of the oxidation resistance and diffusion processes in a multilayered TiSiN/TiN(Ag) coating designed for tribological applications. APPLIED SURFACE SCIENCE 609, doi: 10.1016/j.apsusc.2022.155319; FULL TEXT
    (HELIOS, TITAN)

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