Magnetron sputtering system BESTEC (MAGNETRON)

CONTACT US

Guarantor: Jan Prášek, Ph.D.
Technology / Methodology: Etching & Deposition
Instrument status: Operational Operational, 9.5.2024 16:54, Installed targets: Mo(1), Pt(2), CoFeB(3), Pd(4), Ni(5), Mn(6), Ta(7), Fe(8) + oxygen
Equipment placement: CEITEC Nano - C1.36
Research group: CF: CEITEC Nano


Description:

The UHV physical vapor deposition system for DC and RF thin-film sputtering deposition (mostly the metals) which utilizes strong electric and magnetic fields to increase the deposition yield. The eight sputtering target system has a reactive gas inlet for reactive deposition of oxides and nitrides as well. The substrate can be heated up to 800 °C.


Publications:

  • MISIUREV, D.; KASPAR, P.; SOBOLA, D.; PAPEZ, N.; FAWAEER, S.H.; HOLCMAN, V., 2023: Exploring the Piezoelectric Properties of Bismuth Ferrite Thin Films Using Piezoelectric Force Microscopy: A Case Study. MATERIALS 16(8), p. 1 - 18, doi: 10.3390/ma16083203; FULL TEXT
    (MAGNETRON, KRATOS-XPS)
  • WOJEWODA, O.; HRTOŇ, M.; DHANKHAR, M.; KRČMA, J.; DAVÍDKOVÁ, K.; KLÍMA, J.; HOLOBRÁDEK, J.; LIGMAJER, F.; ŠIKOLA, T.; URBÁNEK, M., 2023: Phase-resolved optical characterization of nanoscale spin waves. APPLIED PHYSICS LETTERS 122(20), p. 1 - 6, doi: 10.1063/5.0151338; FULL TEXT
    (RAITH, BRILLOUIN, LYRA, MAGNETRON, EVAPORATOR)
  • ARREGI URIBEETXEBARRIA, J.; RINGE, F.; HAJDUČEK, J.; GOMONAY, O.; MOLNÁR, T.; JASKOWIEC, J.; UHLÍŘ, V., 2023: Magnetic-field-controlled growth of magnetoelastic phase domains in FeRh. JOURNAL OF PHYSICS: MATERIALS 6(3), p. 1 - 15, doi: 10.1088/2515-7639/acce6f; FULL TEXT
    (MAGNETRON, KERR-MICROSCOPE, VERSALAB, RIGAKU9, ICON-SPM, HELIOS, TITAN)
  • Hnilica, J., 2023: Current-induced domain wall propagation in ferrimagnetic wires. MASTER´S THESIS ; FULL TEXT
    (MAGNETRON, VERSALAB, RIGAKU9, SUSS-RCD8, DWL, WIRE-BONDER, KERR-MICROSCOPE)
  • Molnár, T., 2023: Magneto-optical gradient effect imaging of magnetic textures. MASTER´S THESIS , p. 1 - 73; FULL TEXT
    (MAGNETRON, RIGAKU9, KERR-MICROSCOPE, TITAN)

Show more publications...